Candidate oxidation resistant coatings via combustion chemical vapor deposition

被引：8
|
作者：
Shanmugham S. [1 ]
Hendrick M. [1 ]
Richards N. [1 ]
Oljaca M. [1 ]
机构：
[1] MicroCoating Technologies, Inc., Atlanta, GA 30341
来源：
Journal of Materials Science | 2004年 / 39卷 / 1期
关键词：
Oxidation; Polymer; Combustion; Chemical Vapor Deposition; Vapor Deposition;
D O I：
10.1023/B:JMSC.0000008094.12813.0c
中图分类号：
学科分类号：
摘要：
Tantalum oxide, yttria and alumina coatings were grown on single crystal substrates successfully via CCVD. While tantalum oxide and yttria coatings were crystalline at temperatures greater than 1000°C, the alumina coatings were primarily amorphous. Coatings were grown in thickness ranging from 0.1 μm to greater than 1 μm in thickness.
引用
收藏
页码：377 / 381
页数：4
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