Numerical analysis of theoretical model of the RF MEMS switches

被引：6
|
作者：
Zhang Lixian
Yu Tongxi
Zhao Yapu
机构：
[1] Chinese Academy of Sciences,State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics
[2] Hong Kong University of Science and Technology,Department of Mechanical Engineering
来源：
Acta Mechanica Sinica | 2004年 / 20卷 / 2期
关键词：
RF MEMS; axial stretching; residual stress; fringing field; critical pull-in voltage;
D O I：
10.1007/BF02484263
中图分类号：
学科分类号：
摘要：
An improved electromechanical model of the RF MEMS (radio frequency microelectromechanical systems) switches is introduced, in which the effects of intrinsic residual stress from fabrication processes, axial stress due to stretching of beam, and fringing field are taken into account. Four dimensionless numbers are derived from the governing equation of the developed model. A semi-analytical method is developed to calculate the behavior of the RF MEMS switches. Subsequently the influence of the material and geometry parameters on the behavior of the structure is analyzed and compared, and the corresponding analysis with the dimensionless numbers is conducted too. The quantitative relationship between the presented parameters and the critical pull-in voltage is obtained, and the relative importance of those parameters is given.
引用
收藏
页码：178 / 184
页数：6
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