Micro-hotplate based temperature stabilization system for CMOS SAW resonators

Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents two methods of temperature control for CMOS SAW resonators using embedded polysilicon heaters. The first approach employs the oven control temperature stabilization scheme. Using this approach, the device’s temperature is elevated using on-chip heaters to Tmax = 42°C to maintain constant device temperature. Both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of −97.2 ppm/°C has been reduced to −23.19 ppm/°C when heated to 42°C. The second scheme uses a feedback control circuit to switch the on-chip heaters on and off depending on the ambient temperature. This method provided reduction of the TCF from −165.38 ppm/°C, to −93.33 ppm/°C. Comparison of both methods was also provided.