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Response Analysis of Nonlinear Free Vibration of Parallel-Plate MEMS Actuators: An Analytical Approximate Method

被引：0
|
作者：
Yongping Yu
Lihui Chen
Zhigang Wang
Guoji Liu
机构：
[1] Jilin University,College of Construction Engineering
[2] Jilin University,College of Physics
来源：
Journal of Vibration Engineering & Technologies | 2020年 / 8卷
关键词：
Vibration; Pull-in voltage; Parallel-plate model; Analytical approximate solution; Newton’s method; Galerkin’s method;
D O I：
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摘要：
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页码：935 / 946
页数：11
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