Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

被引：0
|
作者：
Xiaohong Jiang
Guoyun Wu
Jingfang Zhou
Shujie Wang
Ampere A Tseng
Zuliang Du
机构：
[1] Henan University,Key Laboratory of Special Functional Materials of Ministry of Education
[2] University of South Australia,Ian Wark Research Institute
[3] Arizona State University,School of Engineering of Matter, Transport and Energy
来源：
Nanoscale Research Letters | / 6卷
关键词：
Atomic Force Microscopy; Atomic Force Microscopy Image; Complex Nanostructures; Applied Normal Force; Groove Size;
D O I：
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学科分类号：
摘要：
Atomic force microscope (AFM) equipped with diamond-like carbon (DLC)-coated Si probe has been used for scratch nanolithography on Si surfaces. The effect of scratch direction, applied tip force, scratch speed, and number of scratches on the size of the scratched geometry has been investigated. The size of the groove differs with scratch direction, which increases with the applied tip force and number of scratches but decreases slightly with scratch speed. Complex nanostructures of arrays of parallel lines and square arrays are further fabricated uniformly and precisely on Si substrates at relatively high scratch speed. DLC-coated Si probe has the potential to be an alternative in AFM-based scratch nanofabrication on hard surfaces.
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