Design and Testing of a Novel Two-Axial Flexure-Based Vibration Stage

被引：0
|
作者：
Yunsong Du
Pengchao Dang
Tiemin Li
机构：
[1] Beijing University of Technology,Faculty of Materials and Manufacturing
[2] Beijing University of Technology,College of Mechanical Engineering and Applied Electronics Technology
[3] Tsinghua University,Manufacturing Engineering Institute, Department of Mechanical Engineering
来源：
Journal of Vibration Engineering & Technologies | 2022年 / 10卷
关键词：
Flexure-based mechanism; Flexure hinge; Transverse sensitivity; Vibration stage; Measurement uncertainty;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：499 / 509
页数：10
相关论文
共 50 条
  • [1] Design and Testing of a Novel Two-Axial Flexure-Based Vibration Stage
    Du, Yunsong
    Dang, Pengchao
    Li, Tiemin
    [J]. JOURNAL OF VIBRATION ENGINEERING & TECHNOLOGIES, 2022, 10 (02) : 499 - 509
  • [2] Design and Analysis of a Novel Flexure-Based XY Micropositioning Stage
    Jiao, Chenlei
    Wang, Zhe
    Lv, Bingrui
    Wang, Guilian
    Yue, Weiliang
    [J]. APPLIED SCIENCES-BASEL, 2020, 10 (23): : 1 - 28
  • [3] Design and Testing of a 2-DOF Flexure-based Compliant Stage
    Du, Yunsong
    Li, Tiemin
    Ji, Wei
    Jiang, Yao
    [J]. 2016 THE 3RD INTERNATIONAL CONFERENCE ON MECHATRONICS AND MECHANICAL ENGINEERING (ICMME 2016), 2017, 95
  • [4] Design, analysis and testing of a novel decoupled2-DOF flexure-based micropositioning stage
    Yang, Shang
    Chen, Weihai
    Liu, Jingmeng
    Chen, Wenjie
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2017, 27 (09)
  • [5] Design, analysis, and testing of a flexure-based vibration-assisted polishing device
    Gu, Yan
    Zhou, Yan
    Lin, Jieqiong
    Lu, Mingming
    Zhang, Chenglong
    Chen, Xiuyuan
    [J]. AIP ADVANCES, 2018, 8 (05)
  • [6] Design, modeling and testing of a novel flexure-based displacement amplification mechanism
    Lai, Lei-Jie
    Zhu, Zi-Na
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2017, 266 : 122 - 129
  • [7] Design of a Flexure-based XY Positioning Stage with Balanced Axial Forces on Decoupling Modules
    Zhang, Zhen
    Liu, Zhiqing
    Yan, Peng
    [J]. 2016 6TH IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (IEEE 3M-NANO), 2016, : 83 - 88
  • [8] Design and dynamic analysis of a novel six-DOF flexure-based compliant stage for micro-vibration
    Yunsong Du
    Chongxin Qiao
    Tiemin Li
    [J]. Journal of Mechanical Science and Technology, 2024, 38 : 1079 - 1088
  • [9] Design and dynamic analysis of a novel six-DOF flexure-based compliant stage for micro-vibration
    Du, Yunsong
    Qiao, Chongxin
    Li, Tiemin
    [J]. JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2024, 38 (03) : 1079 - 1088
  • [10] Novel Design of a Totally Decoupled Flexure-Based XYZ Parallel Micropositioning Stage
    Xu, Qingsong
    Li, Yangmin
    [J]. 2010 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM), 2010,
12345