Selective laser melting of high aspect ratio 3D nickel-titanium structures two way trained for MEMS applications

Selective laser melting has been used to build high aspect ratio, three-dimensional NiTi micro-electro-mechanical components. Cantilever beams manufactured in this way have been two-way trained and actuated by ohmic heating demonstrating the suitability of the process for applications in micro-electromechanical technologies. The influence of laser dwell time and raster pitch on the density of NiTi shape memory alloy parts and the resolvable feature sizes achievable are discussed. The shape memory effect properties of solid parts produced by selective laser melting are also reported in contrast to those properties exhibited by NiTi alloys resulting from other processes. © 2007 Springer Science+Business Media B.V.