A high transmission power stabilizer using brewster window for a UV pulsed laser in long-term drift

被引：0
|
作者：
Hyungwoo Lee
Hoonchul Ryoo
Jae W. Hahn
机构：
[1] Yonsei University,Nano Photonics Laboratory, School of Mechanical Engineering
来源：
Journal of Mechanical Science and Technology | 2011年 / 25卷
关键词：
Brewster window; KrF excimer laser; Laser beam attenuator; PID control; Power stabilizer; UV laser;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
In this study, we developed a high transmission power stabilizer equipped with a Brewster window incorporating a proportional-integral-derivative (PID) controller. We used a 248 nm KrF excimer laser signals collected by a photodiode detector (PD) to stabilize the power fluctuation of pulsed laser in long-term drift situation. The power fluctuation averaged 2.73% after 45 minutes of uninterrupted operation. However, with the power stabilizer, the power fluctuation averaged 0.97%. The power stabilizer exhibited a maximum transmission rate of 96.9% which is better than that of conventional one and the maximum attenuated optical transmission reached 65.6%.
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页码：2121 / 2125
页数：4
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