The structure and dielectric properties of thin barium zirconate titanate films obtained by RF magnetron sputtering

被引：0
|
作者：
A. V. Tumarkin
S. V. Razumov
A. G. Gagarin
A. G. Altynnikov
V. M. Stozharov
E. Yu. Kaptelov
S. V. Senkevich
I. P. Pronin
机构：
[1] St. Petersburg State Electrotechnical University,Ioffe Physical Technical Institute
[2] Herzen State Pedagogical University,undefined
[3] Russian Academy of Sciences,undefined
来源：
Technical Physics Letters | 2016年 / 42卷
关键词：
Technical Physic Letter; Strontium Titanate; Ferroelectric Phase Transition; Ceramic Target; Zirconium Atom;
D O I：
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学科分类号：
摘要：
Submicron thin layers of BaZrxTi1–xO3 are grown in-situ by RF magnetron sputtering of a ceramic target (x = 0.50) on a substrate of Pt/r-cut leucosapphire Al2O3. It is shown that the composition of the ferroelectric layer is not identical to the composition of the sputtered target and is shifted toward barium zirconate. The reasons for such behavior are discussed. The obtained samples are characterized by high breakdown voltages (1 MV/cm and higher). The structural and high-frequency dielectric properties are studied, and high tunability of the capacitance of thin layers is revealed.
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页码：143 / 145
页数：2
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