Large-scale molecular dynamics simulations of high energy cluster impact on diamond surface

被引:0
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作者
Y. Yamaguchi
J. Gspann
机构
[1] Institut für Mikrostrukturtechnik,
[2] Forschungszentrum Karlsruhe and Universität Karlsruhe,undefined
[3] Postfach 3640,undefined
[4] D-76021 Karlsruhe,undefined
[5] Germany,undefined
关键词
PACS. 36.40.-c Atomic and molecular clusters – 31.15.Qg Molecular dynamics and other numerical methods;
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摘要
Large-scale molecular dynamics simulations with high acceleration energy on a diamond surface were performed in order to investigate the surface erosion process. Accelerated argon or CO2 clusters (∼960 atoms, 100 keV/cluster) impacted on the (111) surface of diamond which consisted of more than 1,000,000 carbon atoms. A typical hemispherical crater appeared about 0.7 ps after the impact, and two or three-layered shockwaves were formed and propagated to certain directions, but the crater was immediately filled up with the fluidized hot carbon material due to the collective elastic recovery before the reflection of the shockwave. The impact energy of the cluster was at first transferred mainly as kinetic energy of the diamond surface in a short time, and the potential energy was activated later. The activated carbon and oxygen atoms from the impact cluster stimulated the evaporation from the diamond surface for the CO2 cluster impact while the evaporation seemed to be suppressed by the argon atoms themselves for the argon cluster impact.
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页码:103 / 106
页数:3
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