First Russian standards in nanotechnology

被引：10
|
作者：
Gavrilenko V.P. [1 ]
Lesnovsky E.N. [1 ]
Novikov Yu.A. [2 ]
Rakov A.V. [2 ]
Todua P.A. [1 ]
Filippov M.N. [3 ]
机构：
[1] Center for Surface and Vacuum Research
[2] Prokhorov General Physics Institute, Russian Academy of Sciences
[3] Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences
来源：
Bulletin of the Russian Academy of Sciences: Physics | 2009年 / 73卷 / 04期
关键词：
Test Object; Primary Standard; Transfer Standard; Relief Structure; Functional Block Diagram;
D O I：
10.3103/S1062873809040017
中图分类号：
学科分类号：
摘要：
The problem of ensuring uniformity of measurements in nanotechnology is discussed. A functional block diagram is developed for length unit size transfer from the primary length standard (meter) to the nanometric range. The first six Russian national standards are presented, which ensure this transfer using scanning electron and atomic force microscopes. © Allerton Press, Inc. 2009.
引用
收藏
页码：433 / 440
页数：7
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