Numerical study of a membrane-type micro check-valve for microfluidic applications

In this paper, we present a method to simulate membrane-type micro check-valve using finite element method with fluid structure interaction formulation. The designed micro check-valve which is analogue of semiconductor device, diode, allows the fluid to pass in forward-mode and blocks it in reverse mode. To have a better understanding on the valve design we also studied the effect of design dimensions on the valve performance. Our study shows the valve flow rate-pressure curve is similar to diode current–voltage characterization curve. A series of simulations were carried out by using two-way fully-coupled Fluid Structure Interaction (FSI) analysis. Using Arbitrary Lagrangian–Eulerian (ALE) method in combination with high viscosity region instead of solid valve-seat enables the designer to overcome simulations difficulties and reduces the amount of calculation time by not considering the contact phenomenon of the membrane and the valve seat. The results show the valve can withstand pressures of up to 11 kPa in reverse-mode regardless of membrane’s hole-size and length of chamber-inlet. Also, chamber-inlet size has high effect on valve opening threshold point in a way that increment of chamber-inlet area will reduce opening threshold point and vice versa.