共 50 条
- [2] Porous Structure Formation on Silicon Surface Treated by Plasma Focus Device Journal of Fusion Energy, 2013, 32 : 471 - 478
- [6] Carbonitriding of silicon using plasma focus device JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2009, 27 (02): : 381 - 387
- [7] Characterization of silicon surface implanted by nitrogen ion beam from plasma focus device MATERIALS RESEARCH EXPRESS, 2019, 6 (09):
- [10] Formation of buried porous silicon structure by hydrogen plasma immersion ion implantation ADVANCES IN MICROCRYSTALLINE AND NANOCRYSTALLINE SEMICONDUCTORS - 1996, 1997, 452 : 427 - 430