Formation of nanostructured carbon films in gas-discharge plasmas

被引:0
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作者
A. A. Zolotukhin
A. N. Obraztsov
A. O. Ustinov
A. P. Volkov
机构
[1] Moscow State University,
关键词
Carbon Nanotubes; Emission Spectroscopy; Carbon Film; Optical Emission Spectroscopy; Nanostructured Carbon;
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摘要
Deposition of carbon materials from methane-hydrogen gas mixtures in a DC gas discharge is investigated. Parameters ensuring stable discharge conditions and synthesis of diamond and graphite-like films are determined. Optical emission spectroscopy is used to analyze the composition of the activated gas phase in the course of carbon film deposition. Synthesis of graphite-like carbon nanotubes and nanocrystallites is shown to correlate with the presence of C2 dimers in the plasma. A noncatalytic mechanism of synthesis of nanostructured graphite in a carbon-containing gas phase is proposed.
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页码:1154 / 1158
页数:4
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