Effects of irradiation parameters on metal surface erosion by pulsed ion beams

Potential application of high-power ion beams of submicrosecond and microsecond durations with the initial particle energy from 50 to 1000 keV and power density 107-109 W/cm2 to ensure metal surface erosion are investigated. Evaporation is treated as a major erosion mechanism and the erosion coefficient is taken as an efficiency indicator. Dependences of the erosion coefficients of several metals on beam parameters obtained via calculations using a technique based on the solution of thermal conductivity equation with phase transitions are presented. The ion species, their initial energy, current pulse duration and power density are used as the beam parameters controlling the result of irradiation. © 2007 Springer Science+Business Media, Inc.