Absorption spectra of TiO2 thin films synthesized by the reactive radio-frequency magnetron sputtering of titanium

被引：0
|
作者：
V. M. Ievlev
S. B. Kushchev
A. N. Latyshev
L. Yu. Leonova
O. V. Ovchinnikov
M. S. Smirnov
E. V. Popova
A. V. Kostyuchenko
S. A. Soldatenko
机构：
[1] Voronezh State University,
[2] Voronezh State Technical University,undefined
来源：
Semiconductors | 2014年 / 48卷
关键词：
Rutile; TiO2 Thin Film; Brookite; Reflection High Energy Electron Diffraction; Crystal Modification;
D O I：
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中图分类号：
学科分类号：
摘要：
The optical absorption spectra of TiO2 thin films with different phase compositions (anatase, rutile-brookite, anatase-rutile-brookite) are studied. The films are produced by the reactive radio-frequency magnetron sputtering of titanium in different atmospheres. It is shown that, on the assumption of the additivity of the contributions of each phase to the general spectrum with the fraction of the phase in the layer known, it is possible to use the method of subtraction of the spectra of individual phases. The fundamental absorption spectra of all of the crystal modifications detected in the multiphase films by structural studies are separated out, and the edges of the optical transitions in all of the phase components are established.
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页码：848 / 858
页数：10
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