Self-Healing of Defect-Mediated Disorder in ZnO Thin Films Grown by Atomic Layer Deposition

被引:0
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作者
Don P. Benny
Vikas Munya
Arpan Ghosh
Ravinder Kumar
Dipayan Pal
Herbert Pfnür
Sudeshna Chattopadhyay
机构
[1] Indian Institute of Technology Indore,Department of Physics
[2] Leibniz Universität Hannover,Department ATMOS, Institute for Solid State Physics
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关键词
Atomic layer deposition; ZnO thin-film; defect-induced disorder; Urbach energy; morphology; photoluminescence; thickness-dependent optical properties;
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页码:8293 / 8302
页数:9
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