Design and performance analysis of hybrid SPDT RF MEMS switch

This paper presents the design and simulation of Hybrid type RF MEMS switch for satellite communication application. The Hybrid switch beam is having non-uniform meanders and holes. The gold material is used as a beam and CPW. The gap between the beam and dielectric is 3 μm. The design is based on the shunt and series configuration consisting of 2 capacitive switches and 2 Ohmic switches. The performance analysis is done by using the HFSS tool. The individual Ohmic switch having 31 dB isolation and capacitive switch having 67 dB isolation. The proposed Hybrid switch having 87 dB isolation when both switches are in the OFF state. During ON state, the switch shows the low insertion loss of − 0.18 dB and return loss of − 63 dB at 16 GHz.