共 31 条
- [1] Electron heating and radiation in high aspect ratio sub-micron plasma generated by an ultrafast Bessel pulse within a solid dielectric EUROPEAN PHYSICAL JOURNAL-SPECIAL TOPICS, 2023, 232 (13): : 2247 - 2252
- [3] Sub-micron high aspect ratio silicon beam etch DEVICE AND PROCESS TECHNOLOGIES FOR MEMS AND MICROELECTRONICS II, 2001, 4592 : 315 - 325
- [6] Fabrication of high aspect ratio sub-micron gratings on PMMA plate based on synchrony radiation lithography Guangxue Xuebao/Acta Optica Sinica, 2010, 30 (05): : 1451 - 1454
- [7] FABRICATION OF HIGH ASPECT RATIO SUB-MICRON STRUCTURES BY VARIABLE-SHAPE ELECTRON LITHOGRAPHY. 1600, (03): : 1 - 4
- [10] Structure quality of high aspect ratio sub-micron polymer structures patterned at the electron storage ring ANKA JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (06): : 3196 - 3201