Optimisation Design of a Piezoelectric Micropump

A new aluminium based valveless fluid micropump is manufactured by the micromachining method. The pump consists of two fluid-diffuser/nozzle elements on each side of a chamber with an oscillating diaphragm which is actuated with a piezoelectric disk. The two simultaneous vibrating diaphragms produce a large oscillating chamber volume. To obtain the optimal structural parameters at the design stage of the pump, the ANSYS simulation method is used. The pump prototype with two aluminium diaphragms of ○ (with a slash) 10 mm 3 0.1 mm has been simulated. The chamber oscillating volume can be as large as 800 ml for water pumping.