High aspect ratio electrostatic micro actuators using LIGA process

High-power electrostatic microactuators using LIGA process have been fabricated. Comb drive type actuators and a wobble motor were designed and fabricated. A basic structure of the microactuators was composed of movable and fixed electrodes of Ni, a sacrificial layer of SiO2 and a Si substrate, and carried out by one mask process. As design rules, a minimum resist width of 2 μm, resist height of 120 μm, maximum width of movable parts of 10 μm, minimum width of fixed parts of 40 μm and driving voltage of about 100 V, were decided. A 120 μm-thick PMMA resist was formed on a Si substrate by a casting method. The PMMA was exposed using a compact SR source “AURORA”, using an X-ray mask with 7 μm-thick Au absorber on a 2 μm-thick poly-Si membrane. The exposed PMMA was developed by a developer. Ni microstructures with 100 μm-height, 2 μm-minimum width, 2 μm-minimum gap, and then maximum aspect ratio of 50, were made by electroforming. Ni microstructures used for movable electrodes were separated from the substrate by lateral etching of SiO2. After lateral etching of SiO2, Au wires were bonded to electrodes. Actuation of the comb drive type actuator and rotation of the wobble motor were confirmed. The applied voltage to the comb drive actuator and the wobble motor were 65 and 125 V.