Microstructure of columnar-grained SrTiO3 and BaTiO3 thin films prepared by chemical solution deposition

The microstructure and lattice defects of SrTiO3 and BaTiO3 thin films with columnar grains prepared by a chemical solution deposition technique have been investigated by means of transmission electron microscopy. The columnar grains in the SrTiO3 films exhibit a preferential orientation with a crystallographic 〈111〉 direction parallel to the normal of film, which, in turn, follows the orientation texture of the substrate Pt layer. Cubic-to-cubic relationships have been found for the two materials. For the BaTiO3 films the columnar grains are oriented in a random way without any preferential relationship to the substrate Pt layer. Pores, lattice defects, and grain boundaries occur in either type of film, however in different configurations. This reflects the individual nature of the materials and the different formation and growth mechanisms of the films under the preparation conditions.