共 50 条
- [3] Large deflection analysis of circular piezoelectric micro-actuator with flexoelectric effect Scientific Reports, 13
- [4] Micro Thermal Actuator aided Micro Ultrasonic Motor Actuation 2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2012, : 273 - 276
- [6] Development and Analysis of Micro/Nano Displacement Sensor for Piezoelectric Actuator 2009 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, VOLS 1-7, CONFERENCE PROCEEDINGS, 2009, : 1841 - +
- [9] Investigation of actuation behavior for micro array thermal actuator based upon electrical analysis MEMS/MOEMS Components and Their Applications II, 2005, 5717 : 155 - 166