The Effect of Water Vapor and Temperature on the Reaction Behavior of AlN Powder at 1273 K to 1423 K (1000 °C to 1150 °C)

The reaction behavior of AlN powder at 1273 K to 1423 K (1000 °C to 1150 °C) for 15 hours in Ar-20 vol pct H2O, air-20 vol pct H2O, and dry air was studied. Thermogravimetric analyses in combination with XRD, Raman spectroscopy, FTIR and TEM with HRTEM were adopted to investigate the phase and microstructure of sample after reaction. The results show that AlN powder in Ar-20 vol pct H2O exhibits a higher tendency to be oxidized than that in air-20 vol pct H2O and dry air. It reveals that the presence of water vapor affects the transport processes both in oxide product and AlN powder. The total mass gain of AlN in wet air is less than that in dry air due to the competition between H2O and O2. The reaction kinetics of AlN under the three conditions is diffusion controlled and can be dealt with Chou’s model.