AFM-tip-induced and current-induced local oxidation of silicon and metals

被引：0
|
作者：
P. Avouris
R. Martel
T. Hertel
R. Sandstrom
机构：
[1] IBM Research Division,
[2] T.J. Watson Research Center,undefined
[3] Yorktown Heights,undefined
[4] USA,undefined
来源：
Applied Physics A | 1998年 / 66卷
关键词：
Oxidation; Silicon; Local Oxidation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：S659 / S667
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