Synthesis and characterization of CeO2 thin films deposited by spray pyrolysis

Cerium dioxide (CeO2) thin films were deposited on glass substrates by spray pyrolysis using a solution of alcohol–water and CeCl3 · 7H2O as precursor. The structural, morphological, optical and electrical properties of these films were investigated. SEM images reveal the presence of cracks in the films that depend on substrate temperature and deposition time. Films deposited in temperatures between 400 and 500 °C during up to 10 min are crack free and also present high optical transmittance, reaching up to 90% in the visible range and close to infrared. X-ray diffraction shows that all films are polycrystalline and the growth preferential direction is altered from (111) to (200) with the increase of the deposition temperature. The activation energy of the electrical conduction process is 0.67 ± 0.03 eV.