Micro and nano electrical discharge machining in microfluidics and micro nanotechnology

被引：0
|
作者：
A. Benilov
V. Skryshevsky
Y. Robach
M. Cabrera
机构：
[1] Université Claude Bernard - Lyon 1- Bâtiment Léon Brillouin,Institut des Nanotechnologies de Lyon, UMR CNRS ECL INSA UCBL 5270
[2] Kyiv Taras Schevchenko University,undefined
[3] Radiophysics Department,undefined
来源：
International Journal of Material Forming | 2008年 / 1卷
关键词：
Micro electrical discharge machining; EDM; Microfluidics; Microtechnology; Nanotechnology;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Potential applications of micro and nano EDM in the research in micro nanotechnology and microfluidics are first discussed. Milling EDM, one variation of EDM, is proposed as a flexible tool for such applications. In practice EDM milling is a process rarely used because it is difficult to prepare thin electrode tools. Therefore the use of electrochemically etched Pt-Ir electrode tool for EDM machining is demonstrated. In addition a compact micro EDM machine is described. Preliminary results concerning the micromachining of silicon are also shown.
引用
收藏
页码：1315 / 1318
页数：3
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