A study of the effect of growth conditions in CVD method with ARC-discharge on diamond crystal nucleation and habit

被引：0
|
作者：
A. N. Blaut-Blachev
A. A. Averin
A. V. Shapagin
B. V. Spitsyn
机构：
[1] Frumkin Institute of Physical Chemistry and Electrochemistry,
来源：
Protection of Metals and Physical Chemistry of Surfaces | 2017年 / 53卷
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摘要：
Nucleation of diamond crystals resulting from application of the CVD method in a methane/ hydrogen mixture using the arc-discharge for activation of the gas mixture was studied experimentally. Data on diamond crystal sizes depending on the composition of gas mixture, substrate temperature and other parameters were obtained. When this technique was used, the crystal growth rate could exceed 100 μm/h. Contributions of electrons and negatively charged particles to the growth of crystals were shown.
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页码：75 / 79
页数：4
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