Analysis of the laser ablation processes for thin-film silicon solar cells

被引:0
|
作者
Stefan Haas
Gunnar Schöpe
Christoph Zahren
Helmut Stiebig
机构
[1] Research Centre Jülich,Institute of Energy Research 5—Photovoltaic
[2] Malibu GmbH & Co. KG,undefined
来源
Applied Physics A | 2008年 / 92卷
关键词
41.85.Ew; 52.38.Mf; 84.60.Jt;
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摘要
A detailed analysis of the monolithical series connection of thin-film silicon modules with ZnO/Ag back contact is presented. In this study, pulsed lasers with wavelengths of 1064 nm and 532 nm were used. The influence of various laser parameters like laser power, pulse overlap, etc., on the different patterning steps is discussed. The focus of this study was on the back contact patterning process. Here (i) the flake formation process during the ablation and (ii) the influence of a NIR-laser source as an alternative approach to the green laser were investigated in detail. The latter would reduce system costs if only one NIR-laser source could be used for all patterning steps.
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页码:755 / 759
页数:4
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