Investigation of Near-Surface Mechanical Properties of Materials Using Atomic Force Microscopy

As ultra-thin films or small-scale structures become widely used in electronics and biology, knowledge concerning their near-surface mechanical properties of the materials is increasingly important. Atomic force microscopy (AFM) is employed to determine near-surface elastic modulus via force-penetration curves acquired during indentation. Samples include polydimethylsiloxane (PDMS), parylene, mica, and single-crystal silicon, and indentations are performed with single-crystal silicon and silicon nitride AFM tips. An analysis algorithm based on the secant modulus method is proposed to extract the true penetration curves from the experimental displacement curves. The penetration data is then analyzed in terms of Hertzian model to estimate the elastic modulus. Three concerns in applying nanoscale AFM indentation to the measurement of the elastic modulus of an ultra-thin material are addressed. First, the effect of the lateral force caused by the inclined angle of the cantilevered probe is investigated theoretically and by numerical simulation. A second concern is local plastic deformation induced by a sharp probe tip. In this case, numerical results show a relatively small effect on the force-penetration curves if the plastic deformation is limited to the central area below the probe tip. The deviation of the elastic-plastic simulation from the elastic estimation depends on the yield strength of the material. Finally, the effect of stiffness matching between the AFM probe and the sample is a key issue that is studied numerically, and appropriate stiffness matching criteria are suggested.