Morphology and Structure of BN and B4C Nanocrystals

被引:0
|
作者
V. Ya. Shevchenko
G. S. Yur'ev
机构
[1] Russian Academy of Sciences,Grebenshchikov Institute of Silicate Chemistry
[2] Russian Academy of Sciences,Institute of Inorganic Chemistry, Siberian Division
来源
Inorganic Materials | 2001年 / 37卷
关键词
Radiation; Inorganic Chemistry; Hexagonal; Thin Layer; Chemical Vapor Deposition;
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学科分类号
摘要
The morphology and structure of BN and B4C nanocrystals in thin layers produced on Si substrates by plasma-enhanced chemical vapor deposition from triethylamineborane were studied before and after exposure to synchrotron radiation. The as-deposited layers consisted of two types of nanocrystals differing in shape, which all had a defect diamond-like structure. After irradiation, two types of nanocrystals were also observed, but the layers consisted of cubic BN, hexagonal BN, and rhombohedral B4C with lattice parameters differing from those of bulk materials. These results were interpreted as evidence that the irradiated layers contained “centaurs”—intergrowths of different structures with coherent interfaces.
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页码:935 / 940
页数:5
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