Measurement of surface roughness profile by a triangulation method

被引：0
|
作者：
V. N. Demkin
V. A. Stepanov
机构：
[1] Sinergiya Company,
[2] Esenin Ryazan State University,undefined
来源：
Measurement Techniques | 2008年 / 51卷
关键词：
triangulation; scattering indicatrix; roughness; polarization plane;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Some aspects of measuring surface roughness parameters using a laser triangulation method are considered. A connection is established between surface roughness and scattering indicatrices with probing radiation polarization parameters of a semiconductor laser. A marked effect is noted of the form and position of the polarization plane on the measurement error for linear values.
引用
收藏
页码：614 / 617
页数：3
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