Design and study of a long-wavelength monolithic high-contrast grating resonant-cavity-enhanced photodetector

被引：0
|
作者：
Kun Zeng
Xiao-feng Duan
Yong-qing Huang
Kai Liu
Xiao-min Ren
机构：
[1] Beijing University of Posts and Telecommunications,State Key Laboratory of Information Photonics and Optical Communications
来源：
Optoelectronics Letters | 2019年 / 15卷
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摘要：
Novel construction of a resonant-cavity-enhanced photodetector (RCE-PD) with monolithic high-contrast grating (HCG) is proposed to overcome the difficulty of fabricating a high reflective mirror of RCE-PD at 1 550 nm. In this structure, HCG serves as the top mirror of the RCE-PD, whereas InGaAs serves as a sacrificial layer to achieve monolithic integration. During the bandwidth optimization, the ratio of the thickness of the total intrinsic region and the absorption layer is introduced to realize the simultaneous optimization of the thickness of spacing layers and absorption layer. After structural optimization, the quantum efficiency of the device with diameter of 20 μm is 82% at 1 550 nm, and the 3-dB bandwidth is 34 GHz at a bias of 3 V.
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页码：250 / 254
页数：4
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