InGaN/GaN LEDs with a Si-doped InGaN/GaN short-period superlattice tunneling contact layer

被引:0
|
作者
L. W. Wu
S. J. Chang
Y. K. Su
T. Y. Tsai
T. C. Wen
C. H. Kuo
W. C. Lai
J. K. Sheu
J. M. Tsai
S. C. Chen
B. R. Huang
机构
[1] National Cheng Kung University,Institute of Microelectronics, Department of Electrical Engineering
[2] National Central University,Optical Science Center
[3] Hsin-Shi,South Epitaxy Corporation
[4] Tainan County,Institute of Electronics and Information Engineering and Department of Electronic Engineering
[5] National Yunlin University of Science and Technology,undefined
来源
关键词
InGaN/GaN; short-period superlattice (SPS); multiple-quantum well (MQW); light-emitting diode (LED);
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摘要
Nitride-based light-emitting diodes (LEDs) with Si-doped n+-In0.23Ga0.77N/GaN short-period superlattice (SPS) tunneling contact top layer were fabricated. It was found that although the measured specific-contact resistance is around 1 × 10−2 Ω-cm2 for samples with an SPS tunneling contact layer, the measured specific-contact resistance is around 1.5×100 Ω-cm2 for samples without an SPS tunneling contact layer. Furthermore, it was found that one could lower the LED-operation voltage from 3.75 V to 3.4 V by introducing the SPS structure. It was also found that the LED-operation voltage is almost independent of the CP2Mg flow rate when we grow the underneath p-type GaN layer. The LED-output intensity was also found to be larger for samples with the SPS structure.
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页码:411 / 414
页数:3
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