Determination of stoichiometry and concentration of trace elements in thin BaxSr1–xTiO3 perovskite layers

被引：0
|
作者：
J. S. Becker
S. F. Boulyga
机构：
[1] Central Department of Analytical Chemistry (ZCH),
[2] Research Centre Jülich,undefined
来源：
Analytical and Bioanalytical Chemistry | 2001年 / 370卷
关键词：
Mass Spectrometry; Perovskite; Analytical Procedure; Inductively Couple Plasma Mass Spectrometry; Surface Analysis;
D O I：
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中图分类号：
学科分类号：
摘要：
This paper describes an analytical procedure for determining the stoichiometry of BaxSr1–xTiO3 perovskite layers using inductively coupled plasma mass spectrometry (ICP-MS). The analytical results of mass spectrometry measurements are compared to those of X-ray fluorescence analysis (XRF). The performance and the limits of solid-state mass spectrometry analytical methods for the surface analysis of thin BaxSr1–xTiO3 perovskite layers – sputtered neutral mass spectrometry (SNMS) – are investigated and discussed.
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页码：527 / 533
页数：6
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