An Optical Readout Method Based Uncooled Infrared Imaging System

被引:0
|
作者
Binbin Jiao
Chaobo Li
Dapeng Chen
Tianchun Ye
Yi Ou
Lijun Dong
Qingchuan Zhang
Zheying Guo
Fengliang Dong
机构
[1] Institute of Microelectronics,Micro
[2] Chinese Academy of Sciences,processing and Nano
[3] University of Science and Technology of China,technology Department
[4] Institute of Microelectronics,KEY Laboratory of Mechanical Behavior and Design of Materials
[5] Chinese Academy of Sciences,Silicon Device & Integrated Technology Department
关键词
IR; Imaging; Spatial filter; Opto-mechanical; Uncooled;
D O I
暂无
中图分类号
学科分类号
摘要
This paper presents an optical readout method based uncooled infrared imaging system that contains an optical read-out section and a bi-material micro-cantilever arrays (BMCA) detector. The optical read-out section is based on incoherent light spatial filter technique. The read-out section converts the deflection angles of BMCA caused by absorption of infrared (IR) radiation to a visible image through optical filtering operation of the BMCA with a knife-edge filter. A spatial mathematical model is presented to describe the read-out method and its validity is proved. The IR image of a person’s hand obtained through the using of the 100 × 100 BMCA and the 12-bit A/D quantizer demonstrates the ability of the system to create image. The performance test shows that the average Noise-equivalent temperature difference (NETD) of the imaging system can arrive at about 183mK with some areas having a NETD as low as 78mK.
引用
收藏
页码:261 / 271
页数:10
相关论文
共 50 条
  • [1] An optical readout method based uncooled infrared imaging system
    Jiao, Binbin
    Li, Chaobo
    Chen, Dapeng
    Ye, Tianchun
    Ou, Yi
    Dong, Lijun
    Zhang, Qingchuan
    Guo, Zheying
    Dong, Fengliang
    [J]. INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 2008, 29 (03): : 261 - 271
  • [2] An Optical Readout Method Based on Reflective Filter for Infrared Imaging System
    Wang, Wenjuan
    Hui, Mei
    Gong, Cheng
    Dong, Liquan
    Liu, Ming
    Liu, Xiaohua
    Zhao, Yuejin
    [J]. INFRARED, MILLIMETER-WAVE, AND TERAHERTZ TECHNOLOGIES II, 2012, 8562
  • [3] Study on the MWIR imaging ability of optical readout bimaterial microcantilever FPA uncooled infrared imaging system
    Zhou, Bingbing
    Feng, Yun
    Zhao, Yuejin
    Dong, Liquan
    Liu, Ming
    Chu, Xuhong
    Yu, Xiaomei
    [J]. INFRARED SENSORS, DEVICES, AND APPLICATIONS VI, 2016, 9974
  • [4] Performance analysis of microcantilever arrays for optical readout uncooled infrared imaging
    Guo, Zheying
    Zhang, Qingchuan
    Dong, Fengliang
    Chen, Dapeng
    Xiong, Zhiming
    Miao, Zhengyu
    Li, Chaobo
    Jiao, Binbin
    Wu, Xiaoping
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2007, 137 (01) : 13 - 19
  • [5] The Image Denoising Method for MEMS Based Uncooled Infrared Imaging System
    Zhu, Huishi
    Zhao, Yuejin
    Dong, Liquan
    Liu, Xiaohua
    Yu, Xiaomei
    Gong, Cheng
    Hui, Mei
    [J]. INFRARED, MILLIMETER WAVE, AND TERAHERTZ TECHNOLOGIES, 2010, 7854
  • [6] Wave-front coded optical readout for the MEMS-based uncooled infrared imaging systemaf
    Li, Tian
    Zhao, Yuejin
    Dong, Liquan
    Liu, Xiaohua
    Jia, Wei
    Hui, Mei
    Yu, Xiaomei
    Gong, Cheng
    Liu, Weiyu
    [J]. OPTICAL DESIGN AND TESTING V, 2012, 8557
  • [7] Equivalent circuit model of the substrate-free focal plane array based on the optical readout uncooled infrared imaging system
    Zhang Yong
    Cheng Teng
    Zhang Qing-Chuan
    Chen Da-Peng
    Gao Jie
    Mao Liang
    Wu Jian-Xiong
    Gao Yue
    [J]. JOURNAL OF INFRARED AND MILLIMETER WAVES, 2013, 32 (05) : 394 - +
  • [8] Impact of the light source expanded width on optical readout uncooled infrared system
    Jia, Qian
    Zhao, Yuejin
    Liu, Xiaohua
    Zhu, Weiwen
    Yin, Ganghua
    Dong, Liquan
    [J]. 2011 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTICAL SYSTEMS AND MODERN OPTOELECTRONIC INSTRUMENTS, 2011, 8197
  • [9] Analysis of Optical Readout Sensitivity for Uncooled Infrared Detector
    Cheng Teng
    Zhang Qing-Chuan
    Jiao Bin-Bin
    Chen Da-Peng
    Wu Xiao-Ping
    [J]. CHINESE PHYSICS LETTERS, 2009, 26 (12)
  • [10] Double triangular prism filter based on the optical-readout method in a microelectromechanical infrared imaging system
    Yin, Ganghua
    Zhao, Yuejin
    Dong, Liquan
    Jia, Qian
    Zhu, Weiwen
    Kong, Lingqin
    Liu, Xiaohua
    Ding, Lin
    Yu, Xiaomei
    Jin, Yufeng
    [J]. APPLIED OPTICS, 2012, 51 (05) : 669 - 675