Reliability of RF MEMS switches due to charging effects and their circuital modelling

被引：0
|
作者：
Romolo Marcelli
Giancarlo Bartolucci
George Papaioannu
Giorgio De Angelis
Andrea Lucibello
Emanuela Proietti
Benno Margesin
Flavio Giacomozzi
François Deborgies
机构：
[1] CNR-IMM Roma,Electronic Engineering Department
[2] University of Roma,Solid State Physics Section
[3] Tor Vergata,undefined
[4] University of Athens,undefined
[5] FBK-irst,undefined
[6] ESA-ESTEC,undefined
来源：
Microsystem Technologies | 2010年 / 16卷
关键词：
Equivalent Circuit Model; Dipolar Polarization; Actuation Voltage; Space Charge Polarization; Frenkel Effect;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The reliability of RF MEMS switches is typically reduced by charging effects occurring in the dielectrics. The aim of this paper is to discuss these effects, and to propose analytical and equivalent circuit models which account for most of the physical contributions present in the structure.
引用
收藏
页码：1111 / 1118
页数：7
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