Depth profile analysis of plasma assisted CVD hard materials coatings

被引：0
|
作者：
Klaus Wetzig
Ingolf Endler
机构：
[1] Institut für Festkörper- und Werkstofforschung Dresden,
来源：
Microchimica Acta | 1997年 / 125卷
关键词：
depth profile analysis; PACVD hard materials coatings;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The wear resistance of homogeneous and multilayer TiNx., TiCxNy- and TiCx-coatings is considerably determined by the layer composition and by the conditions at the interface. This work deals with the possibilities of different depth profile analysis methods for the study of TiNx and TiCx layers on hard metal and steel substrates prepared by plasma assisted CVD technique, and furthermore it demonstrates the performance of factor analysis for detailed investigation of a multilayer system consisting of amorphous C and TiCx single layers.
引用
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页码：121 / 125
页数：4
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