Evaluation of dimensional accuracy and surface integrity of cylindrical array microelectrodes and cylindrical array microholes machined by EDM

In this study, the loss self-finishing method based on EDM reverse copy principle was proposed aiming to enhance the prepared efficiency of cylindrical array microholes. First, the effects of geometric parameters of microelectrodes on the diameter consistent error, inlet and outlet deviation, section profile, surface roughness parameters and the heat affected zone thickness were quantitatively investigated. The forming accuracy of cylindrical array microelectrodes obtained by self-finishing and multi-finishing methods were contrastively analyzed. Furthermore, 8 × 8 cylindrical array microelectrodes with diameter of about 185.18 μm and length of 2168.79 μm were fabricated by the loss self-finishing method for the first time. Besides, the size accuracy, surface morphology and surface roughness parameters of cylindrical array microholes machined using array microelectrodes prepared by loss self-finishing method were evaluated. Experimental results disclosed that the average consistent errors of inlet and outlet diameter for cylindrical array microholes, respectively, were 1.495 μm and 3.13 μm, indicating that the cylindrical array microelectrodes obtained by loss self-finishing method are capable to manufacture cylindrical array microholes with good surface quality and high dimensional accuracy.