Thin Film Thermoelectric Generators Autonomous Power Supply for Low-Power Devices

被引：0

作者：

Nurnus, Joachim ^{[1
]}

Habbe, Burkhard ^{[1
]}

机构：

[1] Micropelt GmbH, D-79110 Freiburg, Germany

来源：

TM-TECHNISCHES MESSEN | 2010年 / 77卷 / 01期

关键词：

Energy harvesting; thermoelectric generator; condition monitoring; thin film;

D O I：

10.1524/teme.2010.0984

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Thermoelectric power generation devices can extremely be miniaturized by means of semiconductor technologies. A patented silicon wafer based MEMS-like production process provides devices with a total thickness in the range of 0.5 mm to 1 mm and a footprint from less than 1 mm 2 to 25 mm(2). The fabrication process is based on standard semiconductor equipment and processes. Therefore, ramp-up schemes and economies-of-scale close to those of common chip devices apply to Micropelt products.

引用

页码：44 / 53

页数：10

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