A MULTIPLE-BEAM TUNING-FORK GYROSCOPE WITH HIGH QUALITY FACTORS

被引：0
|
作者：
Wang, Ren [1 ]
Durgam, Shiva Krishna [1 ]
Hao, Zhili [1 ]
Vahala, Linda
机构：
[1] Old Dominion Univ, Dept Mech Engn, Norfolk, VA 23529 USA
来源：
IMECE 2009: PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, VOL 12, PTS A AND B | 2010年
关键词：
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
This paper reports on the design, fabrication, and testing of a multiple-beam tuning-fork gyroscope featuring high Quality factors (Q). A multiple-beam tuning-fork structure is designed to achieve high Qs in its drive mode and sense mode. The gyroscope is fabricated on a 30 mu m-thick SOI wafer using a one-mask fabrication process. The measured Qs of the fabricated gyroscope are 162,060 in the drive-mode and 85,168 in the sense mode at an operation frequency of 16.8kHz. Under a frequency split of 6Hz, the prototype device demonstrates a rate sensitivity of 0.02mV/degrees/sec.
引用
收藏
页码：415 / 416
页数：2
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