Modeling electrodeposition for LIGA microdevice ice fabrication

被引：27
|
作者：
Griffiths, SK [1 ]
Nilson, RH [1 ]
Ting, A [1 ]
Bradshaw, RW [1 ]
Bonivert, WD [1 ]
Hruby, JM [1 ]
机构：
[1] Sandia Natl Labs, Livermore, CA 94551 USA
来源：
MICROSYSTEM TECHNOLOGIES | 1998年 / 4卷 / 02期
关键词：
D O I：
10.1007/s005420050105
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
[No abstract available]
引用
收藏
页码：98 / 101
页数：4
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