A survey of MEMS cantilever applications in determining volatile organic compounds

被引：8
|
作者：
Vasagiri, Suresh [1 ]
Burra, Rajesh Kumar [1 ]
Vankara, Jyothi [1 ]
Patnaik, M. S. Pradeep Kumar [1 ]
机构：
[1] GITAM Deemed Univ, Dept Elect Elect & Commun Engn, Visakhapatnam, Andhra Pradesh, India
来源：
AIP ADVANCES | 2022年 / 12卷 / 03期
关键词：
MASS-SPECTROMETRY; COMPOUNDS VOCS; GAS SENSORS; DESIGN; NANOSTRUCTURES; RELIABILITY; FABRICATION; DEVICES; FAILURE; ARRAY;
D O I：
10.1063/5.0075034
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Recently, microelectromechanical system (MEMS) cantilevers have received significant interest in the domain of Volatile Organic Compounds (VOCs). An analysis of MEMS cantilevers in VOCs is presented in this Review. It examines the different forms of sensors used to detect VOCs. It goes into the conditions that influence MEMS and the strategies used for VOC sensing. It examines research on MEMS cantilevers and other VOC sensing and detection techniques. It shows how MEMS can be used to detect VOCs. Moreover, it presents a comparative study based on the objectives, types of sensors employed, merits, and shortcomings of existing works. This Review intends to explore MEMS cantilevers in VOCs for supporting further research and applications. (C) 2022 Author(s).
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页数：8
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