C-MEMS and C-NEMS

被引：0
|
作者：
Madou, M
机构：
来源：
2004 INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS | 2004年
关键词：
D O I：
10.1109/ICMENS.2004.1508943
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：186 / 186
页数：1
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