KHz repetition rate operation of excimer laser

被引：0
|
作者：
Park, HJ [1 ]
Lee, CH [1 ]
机构：
[1] KYUNG HEE UNIV,INST LASER ENGN,DEPT ELECT ENGN,KYONGGI DO 449701,SOUTH KOREA
来源：
HIGH-POWER LASERS: SOLID STATE, GAS, EXCIMER, AND OTHER ADVANCED LASERS | 1996年 / 2889卷
关键词：
D O I：
10.1117/12.253253
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：104 / 108
页数：5
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