The design and fabrication of two-dimension multi-electrodes array chip and system

We reported a design and fabrication by using Micro-Electro-Mechanical-Systems (MEEMS) processes of a planar 64-channel Multi-Electrode-Array (MEA) chip for recording and/or stimulating cells or tissue slice. The 8 multi-channels recording system was designed to verify the bio-electronic signal detected from the MEA chip. The active electrode area can be 20 mum x 20 mum or 40 mum x 40 mum and with 200 mum or 140 mum space between electrodes, and the metal circuit layout is protected by thin silicone dioxide. Then, the DC measurement to prove this MEA chip device can detect bio-electronic signal normally and immersing the MEA chip in the physiological saline buffer solution to verify that the performance in the AC condition.