Monitoring of Surface Treatment Effects on Sputter-coated Organic Film under Atomic Oxygen and Ultraviolet Irradiation

被引：3

作者：

Matsumoto, Hiroyuki ^{[1
,3
]}

Matsuoka, Mikihiko ^{[1
]}

Iwasaki, Tatsuyuki ^{[1
]}

Kinoshita, Shinobu ^{[1
]}

Noda, Kazutoshi ^{[2
]}

Iwamori, Satoru ^{[3
]}

机构：

[1] Iwasaki Elect Co Ltd, Corp Adv Technol Ctr, Gyoda 3610021, Japan

[2] Natl Inst Adv Ind Sci & Technol, Inst Environm Management Technol, Tsukuba, Ibaraki 3058569, Japan

[3] Kanazawa Univ, Grad Sch Nat Sci & Technol, Kanazawa, Ishikawa 9201192, Japan

来源：

CHEMISTRY LETTERS | 2010年 / 39卷 / 02期

关键词：

POLYIMIDE; KINDS;

D O I：

10.1246/cl.2010.102

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We have been investigating the monitoring Of Surface treatment under ultraviolet lamp processing utilizing a quartz crystal microbalance (QCM) with organic thin film. In this Study, the behavior of surface modification oil sputter-coated organic thin film was Successfully measured by QCM. The film erosion mechanism is discussed here based oil the results of: surface analyses by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM).

引用

页码：102 / 103

页数：2

共 36 条

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