Design and analysis of a large-range precision micromanipulator

This paper proposes the design of a novel flexure-based micromanipulator dedicated to micro/nano manipulation and assembly tasks. The micromanipulator can provide a millimeter-scale operation range with high accuracy by the piezoelectric actuation. It is mainly enabled by a novel mechanical structure with a multi-stage amplification mechanism and a dual-stage grasping end-effector. Strain-type position and force sensors are integrated to detect the output motion and grasping force of the micromanipulator, respectively. Analytical models are established to predict the kinematic, static and dynamic characteristics, with further verification through finite element analysis. Finally, the principle prototype is fabricated, with which strain-gauge calibration and performance tests are conducted. Experimental results demonstrate that the micromanipulator has an operation range of 1 mm, high displacement/force resolution, and large grasping force. All of the results indicate the excellent characteristics of the developed micromanipulator that is expected to be applied into practical industrial applications.