Design of Micro-positioning Stage with Large Stroke Based on Novel Compliant Parallel Mechanism

Compliant mechanism is widely used in the fields of precision mechanical engineering for the advantages such as no friction losses, no need for lubrication, no assembly. However, its stroke is limited by the type of compliant joint, the size and performance of materials. In this paper, a novel compliant parallel mechanism with high precision and large stroke is proposed, which is composed of a parallel mechanism with full compliant joints. The curved planar compliant unit based on the hammer orchid's compliant joints is viewed as the object, and a compliant parallel mechanism is designed through the analysis of the curved planar model method and the finite element. The analysis results show the curved planar compliant unit in compliant parallel mechanism has better performance. According to the analysis results of different types of the curved planar compliant unit, a novel parallel micro-positioning stage with three degrees of freedom is designed, which has the advantages of high precision and large stroke.