Deposition and characterization of Ti(C,N,O) coatings by unbalanced magnetron sputtering

被引：38
|
作者：
Hsieh, JH [1 ]
Wu, W
Li, C
Yu, CH
Tan, BH
机构：
[1] Nanyang Technol Univ, Sch MPE, Singapore 639798, Singapore
[2] Natl Chung Hsing Univ, Dept Mat Engn, Taichung 402, Taiwan
[3] Gint Inst Mfg Technol, Singapore 638075, Singapore
来源：
SURFACE & COATINGS TECHNOLOGY | 2003年 / 163卷
关键词：
magnetron sputtering; hard coating; X-ray diffraction; wear;
D O I：
10.1016/S0257-8972(02)00494-2
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Several TiCNO coatings were deposited using an unbalanced magnetron sputtering system. The coating properties as a function of oxygen/nitrogen flow ratio were studied using glow discharge optical spectrometer, X-ray diffraction, scratch testing and nanoindentation measurement. The tribological properties of the coatings were then investigated using a ball-on-disk setup with alumina balls. The results show that coating properties and performance are greatly affected by the flow rate of oxygen. With oxygen flow rate at 4 seem during deposition, the TiCNO coating shows the lowest wear rate among all. Further increase in oxygen flow rate caused a decrease of hardness, adhesion and wear resistance, while together with the increase of friction coefficient. Also found is that the color of these coatings changes as a function of oxygen flow rate, indicating that these coatings can be used as decorating thin films with wide variety of choices. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：233 / 237
页数：5
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